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Vacuum Pad, Standard Small Type, VPMB, One-touch Fitting Type

Vacuum Pad, Standard Small Type, VPMB, One-touch Fitting Type
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Product Description

Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.

Dimensions

Vacuum Pad Standard Small Type VPMB One Touch Fitting Type
Vacuum Pad Standard Small Type VPMB One Touch Fitting Type
Vacuum Pad Standard Small Type VPMB One Touch Fitting Type
Vacuum Pad Standard Small Type VPMB One Touch Fitting Type

Standard table

Model codeTube O.D.
øD
Pad O.D.
ød
BLTube end
C
EConnection
config. code
VPMB0.7RM[5]-180J1.80.71548.412-T4
VPMB0.7RM[5]-4J[9]410.915
VPMB1RM[5]-180J1.818.412
VPMB1RM[5]-4J[9]410.915
VPMB1.5RM[5]-180J1.81.58.412
VPMB1.5RM[5]-4J[9]410.915
VPMB2RM[5]-180J1.828.412
VPMB2RM[5]-4J[9]410.915
VPMB3RM[5]-180J1.838.412
VPMB3RM[5]-4J[9]410.915
VPMB4RM[5]-180J1.848.412
VPMB4RM[5]-4J[9]410.915
VPMB6R[5]-180J1.8619.578.412.5-T8
VPMB6RM[5]-4J[9]410.915.5
VPMB8R[5]-180J1.88185.58.412.5
VPMB8RM[5]-4J[9]410.915.5
VPMB10R[5]-180J1.8102788.413.7-M4
VPMB10R[5]-4J[9]410.917.5
VPMB15R(A)[5]-180J1.81528(29)9(10)8.413.7
VPMB15R(A)[5]-4J[9]410.917.5
VPMB20R(A)[5]-180J1.82031.2(32.2)10(11)8.413.7-M6
VPMB20R(A)[5]-4J[9]410.917.5
VPMB25R(A)[5]-180J1.82532.2(33.2)11(12)8.413.7
VPMB25R(A)[5]-4J[9]410.917.5
VPMB30R(A)[5]-180J1.83032.2(35.2)11(14)8.413.7
VPMB30R(A)[5]-4J[9]410.917.5
VPMB40R(A)[5]-180J1.84035.2(38.7)14(17.5)8.413.7
VPMB40R(A)[5]-4J[9]410.917.5
VPMB50R(A)[5]-180J1.85036.2(39.2)15(18)8.413.7
VPMB50R(A)[5]-4J[9]410.917.5

Units: mm

*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.

Part Number
VPMB0.7RMN-3J
VPMB0.7RMN-180J
VPMB1RMN-3J
VPMB1RMN-180J
VPMB1.5RMN-3J
VPMB1.5RMN-180J
VPMB2RMN-3J
VPMB2RMN-180J
VPMB3RMN-3J
VPMB3RMN-180J
VPMB4RMN-3J
VPMB4RMN-180J
VPMB6RN-3J
VPMB6RN-180J
VPMB8RN-3J
VPMB8RN-180J
VPMB10RN-3J
VPMB10RN-4J
VPMB15AN-3J
VPMB15AN-4J
VPMB15RN-3J
VPMB15RN-4J
VPMB20AN-4J
VPMB20RN-4J
VPMB25AN-4J
VPMB25RN-4J
VPMB30AN-4J
VPMB30RN-4J
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipRoHSPad Shape Mounting Method Rubber Group Material Environment Color Outer Diameter d
(φ)
Height L1
(mm)
Full length B
(mm)
Mount Connection Screw Vacuum Outlet Tube Outer Diameter
(φ)
Metal parts material

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Part Number
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipRoHSPad Shape Mounting Method Rubber Group Material Environment Color Outer Diameter d
(φ)
Height L1
(mm)
Full length B
(mm)
Mount Connection Screw Vacuum Outlet Tube Outer Diameter
(φ)
Metal parts material

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Basic Information

Pad Type Standard / Holder Set Material Rubber-based Mounting Fitting Fixed Type
Vacuum Outlet Direction Horizontal Fall Prevention Valve None Direct Attached Filter None
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